Microstructure, residual stress, and fracture of sputtered TiN films

By Liqiang Zhang, Huisheng Yang, Xiaolu Pang, Kewei Gao, A. Volinsky. 2013

137 citations recorded by the source corpus.

Subfields: Ceramics and Composites, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/4c11409b03b700eb7831dfe40451fd4d1775c2a9