Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo

By M. Mukaida, Jiwang Yan. 2017

171 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Computational Mechanics, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/4bc12d34d6f9f8f8d96ae9e77da710c27f4af9e5