EUV Lithography

By S. Wurm. International Symposium on VLSI Technology, Systems, and Applications, 2014

136 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/4b68ccfa731bc5782b290779e55a8e99800ac859

Citations in the corpus

• Mechanical metamaterials: a state of the art (2019, unknown): “Control of micro- and nanostructures has become economically and technologically viable, owing to the rapid improvement of such manufacturing techniques as, for instance, 3D printing [2–4], rollto-roll processing [5, 6], electrospinning [7, 8], photolithography and next-generation lithographies (ext”