Reactive magnetron sputtering of thin films: present status and trends

By J. Musil, P. Baroch, J. Vlček, K. Nam, Jeung-Whan Han. 2005

399 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/4b523229a66ef8205d57a903b989ec512e32fc07

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. A. González‐Elipe
2. Á. Barranco
3. A. Borrás
4. A. Palmero

In Materials Chemistry

1. A. González‐Elipe
2. Á. Barranco
3. A. Borrás
4. A. Palmero

In Mechanics of Materials

1. A. González‐Elipe
2. Á. Barranco
3. A. Borrás
4. A. Palmero

Citations in the corpus

• Perspectives on oblique angle deposition of thin films: From fundamentals to devices (2016, background): “excellent reviews dealing with the first two issues when working under a normal configuration [298,299], but the third has only been scarcely addressed, even under simplified conditions.”