AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review

By G. Wingqvist. 2010

120 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/49e632d73e638d9b5410c82e5d8cfad8c034f6e1