Chemical vapour deposition

By Luzhao Sun, Guowen Yuan, Libo Gao, Jieun Yang, M. Chhowalla, M. H. Gharahcheshmeh, K. Gleason, Y. Choi, Byung-Hee Hong, Zhongfan Liu. Nature Reviews Methods Primers, 2021

202 citations recorded by the source corpus.

This PrimeView highlights the process of producing 2D materials using chemical vapour deposition. Advances in this technique have increased yield and quality, and are being used for industrial applications.

Subfields: Aerospace Engineering, Biomedical Engineering, Statistics and Probability

View Paper: https://www.semanticscholar.org/paper/49e58b1ea62dea499098186bd04a3f18dcaebc6f

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Citations in the corpus

• Overview of thin film deposition techniques (2019, background): “The fundamental sequential steps that occur in every CVD process are stated below [79]:  Convection or diffusion movement of reactant in a gas phase to the reaction chamber,  Chemical and gas phase reactions leading to the formation of reactive species and by-products,  Transport of the…”