Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction

By Cheng-Hsin Ma, J. Huang, H. Chena. 2002

257 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/49a8d8f6ab58c7378ea05518e99bb3103553e4b6

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. E. J. Mittemeijer

In Mechanical Engineering

1. E. J. Mittemeijer

Citations in the corpus

• Stress analysis of polycrystalline thin films and surface regions by X-ray diffraction (2005, methodology): “38, 1–29 U. Welzel et al. Stress analysis 9 applied to a ZrN film on Si(100) and to a TiN film on steel by Ma et al. (2002).”