On-chip spiral inductors suspended over deep copper-lined cavities

By Hongrui Jiang, Ye Wang, J.-L.A. Yeh, N. Tien. 2000

166 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/48b0c89794ac9752d380d9f8d7d5af1ccd0815b6

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In Electrical and Electronic Engineering

1. I. Bahl

Citations in the corpus

• Lumped Elements for RF and Microwave Circuits (2003, methodology): “To provide an electromagnetic shield and to reduce the crosstalk between circuits in a MMIC, a cavity backed suspended inductor can be used [62].”