A novel surface-micromachined capacitive porous silicon humidity sensor

By Z. Rittersma, A. Splinter, André Bödecker, W. Benecke. 2000

145 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/48a948da519e297870842659cbe244f75749d28b