Influence of sputtering conditions on ionic conductivity of LiPON thin films

By Y. Hamon, A. Douard, F. Sabary, C. Marcel, P. Vinatier, B. Pecquenard, A. Levasseur. 2006

167 citations recorded by the source corpus.

Subfields: Bioengineering, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/47fb427a2ba72a3971e7d87da6fbef4c36c73653

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In Electrical and Electronic Engineering

  1. Yan Wang
  2. Gerbrand Ceder
  3. Lincoln J. Miara
  4. Yihan Xiao
  5. Yifei Mo
  6. Yizhou Zhu
  7. D. Seo
  8. Qiang Bai

In Materials Chemistry

  1. Yan Wang
  2. Lincoln J. Miara
  3. Yihan Xiao
  4. Gerbrand Ceder
  5. Axel van de Walle
  6. Shyue Ping Ong
  7. Yifei Mo
  8. Kristin A. Persson

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