Electrical and spectroscopic comparison of HfO2/Si interfaces on nitrided and un-nitrided Si(100)

By P. Kirsch, C. Kang, J. Lozano, J. Lee, J. Ekerdt. 2002

255 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/47a15e8494d139fb73929efc99b193d301dcb994