Young's modulus of silicon nitride used in scanning force microscope cantilevers

By A. Khan, J. Philip, P. Hess. 2004

152 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/475c38aaad737a50c0df86668dd47f408fe10108