Strain-driven self-positioning of micromachined structures

By P. Vaccaro, K. Kubota, T. Aida. 2001

139 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/4736477c478031ef9eef2e999e11c7431af52c41