Extreme ultraviolet lithography and three dimensional integrated circuit—A review

By Banqiu Wu, Ajay Kumar. 2014

134 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/46f1cc798f0d5d0386baf0aedb4b2c2c91bcc042

Citations in the corpus

• High-NA EUV lithography: current status and outlook for the future (2022, unknown): “90,91) This is currently being done to improve the cost-effectiveness of advanced lithography.”