A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications

By Yuji Suzuki, D. Miki, M. Edamoto, M. Honzumi. 2010

279 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/46845503177d64a4ad90e272eeb010b0bae6f22a

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In Biomedical Engineering

In Mechanical Engineering

Citations in the corpus

A comprehensive study of non-linear air damping and “pull-in” effects on the electrostatic energy harvesters (2020, background): “0 μW at an in-plane acceleration of 2 g with 63 Hz [20].”
High-performance piezoelectric wind energy harvester with Y-shaped attachments (2019, background): “29 In principle, ambient vibrations energy could be converted into usable electric energy 30 considering a piezoelectric effect [4-6], electromagnetic induction [7, 8], electrostatic 31 induction [9], triboelectric effect [10], and so on.”
Investigation of a MEMS piezoelectric energy harvester system with a frequency-widened-bandwidth mechanism introduced by mechanical stoppers (2012, unknown): “Suzuki et al [30] proposed a MEMS electret generator with electrostatic levitation and nonlinear springs to realize a wideband frequency range.”
Power-Extraction Circuits for Piezoelectric Energy Harvesters in Miniature and Low-Power Applications (2012, methodology): “The electrostatic force has been implemented using moving-plate capacitors primed with an external source such as a battery [3], or primed with an electret [4], [5].”
A methodology for low-speed broadband rotational energy harvesting using piezoelectric transduction and frequency up-conversion (2017, background): “Electret-based harvesters [25] provide a solution, in which the material is only charged once during fabrication with a high voltage, but the capacity of harvesting energy is still limited by the magnitude of capacitance that can be achieved and by the charge density of electrets.”