A novel capacitive-type humidity sensor using CMOS fabrication technology

By Lei Gu, Qing‐An Huang, M. Qin. 2004

150 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Bioengineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/4589765a46963423f7f22c61176a8c5ebad64fc6

How researchers see this paper

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In Atomic and Molecular Physics, and Optics

1. Mohd Nizar Bin Hamidon

Citations in the corpus

• Humidity Sensors Principle, Mechanism, and Fabrication Technologies: A Comprehensive Review (2014, background): “One feature can be their fast and linear response to humidity along with low hysteresis [341–343].”