Atmospheric plasmas for thin film deposition: A critical review

By D. Merche, N. Vandencasteele, F. Reniers. 2012

284 citations recorded by the source corpus.

Subfields: Materials Chemistry, Radiology, Nuclear Medicine and Imaging, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/44788d313037bfcb7b5a623a6b58bab324fb7e9d