Influence of substrate bias, deposition temperature and post-deposition annealing on the structure and properties of multi-principal-component (AlCrMoSiTi)N coatings
By H. Chang, P. Huang, Jien‐Wei Yeh, A. Davison, C. Tsau, Chih-Chao Yang. 2008
185 citations recorded by the source corpus.
Subfields: Materials Chemistry, Mechanics of Materials
View Paper: https://www.semanticscholar.org/paper/43aba64acc4374f7cd14365625f0df84d0dda50c
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In Materials Chemistry
In Mechanics of Materials
Citations in the corpus
- High-Entropy Ceramics (2019, background): “studied the effect of substrate bias from 0 to −200 V on (AlCrMoSiTi)N HEN coatings developed by DC magnetron sputtering at 50% RN [43].”