Survey of methods to characterize thin absorbing films with Spectroscopic Ellipsometry

By J. Hilfiker, T. Tiwald, D. Convey, Steven M. Smith, J. Baker, H. Tompkins. 2008

302 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/436e35d3a544f1ed0100c523e6ee7e38a083d8b5