integrations and challenges of novel high-k gate stacks in advanced cmos technology

By G. He, Liqiang Zhu, Zhaoqi Sun, Qing Wan, Lide Zhang. 2011

143 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/42636d9c7b80d89f3b9901dfca68c2cb7f8b6be4