Improved reflectance and stability of Mo/Si multilayers

By S. Bajt, J. Alameda, Troy W. Barbee, Jr., W. Miles Clift, J. Folta, B. Kaufmann, E. Spiller. SPIE Optics + Photonics, 2001

149 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/42338441337efe01c0d31a2c0190959c631d0317