Photoresist reflow method of microlens production Part I: Background and experiments
By F. O'Neill, John T. Sheridan. 2002
148 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Surfaces, Coatings and Films
View Paper: https://www.semanticscholar.org/paper/41f4ff54edab3cf415f7f05078592fa9848ef55c
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In Atomic and Molecular Physics, and Optics
In Biomedical Engineering
In Surfaces, Coatings and Films
Citations in the corpus
- Variable-focusing microlens with microfluidic chip (2004, methodology): “The photoresist reflow method, suggested by Prpovic in 1988, is to melt photoresist structures to form small lens shapes due to the surface tension of the liquid resist [ 14 ].”