Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon

By P. Pichler. 2004

297 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/4163812a14b78d837a2a493c090316365cc2e9b5