Analysis and Design Principles of MEMS Devices

By M. Bao. 2005

160 citations recorded by the source corpus.

View Paper: https://www.semanticscholar.org/paper/40df3315710f9b6232ab7b9ba9c37b94380010b4

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  1. Jingwei Zhang
  2. Dongping Wu
  3. Chenyu Wen
  4. Zhaoyang Pi
  5. Zhibin Zhang

Citations in the corpus