Density, sp 3 fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopy

By Andrea C. Ferrari, A. Libassi, B. Tanner, V. Stolojan, Jun Yuan, L. M. Brown, S. Rodil, B. Kleinsorge, John Robertson. 2000

504 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/40beb8622815577243166f2ede447ed46b54c365

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In Electrical and Electronic Engineering

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