Fabrication of graphene nanoribbon by local anodic oxidation lithography using atomic force microscope

By S. Masubuchi, M. Ono, K. Yoshida, K. Hirakawa, T. Machida. 2008

164 citations recorded by the source corpus.

We conducted local anodic oxidation (LAO) lithography in single-layer, bilayer, and multilayer graphenes using tapping-mode atomic force microscope. The width of insulating oxidized area depends systematically on the number of graphene layers. An 800-nm-wide bar-shaped device fabricated in single-layer graphene exhibits the half-integer quantum Hall effect. We also fabricated a 55-nm-wide graphene nanoribbon (GNR). The conductance of the GNR at the charge neutrality point was suppressed at low temperature, which suggests the opening of an energy gap due to lateral confinement of charge carriers. These results show that LAO lithography is an effective technique for the fabrication of graphene nanodevices.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/3f45073eba15faf4c621f72bd448f6f827c25fd9

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Boxin Tang
2. Hanyang Gao
3. Guoxin Hu
4. A. Mahmood
5. C. Soldano
6. E. Dujardin
7. L. Zou
8. Yasodinee Wimalasiri

In Electrical and Electronic Engineering

1. Boxin Tang
2. Hanyang Gao
3. Guoxin Hu
4. A. Mahmood
5. C. Soldano
6. E. Dujardin
7. J. Lam

In Materials Chemistry

1. Boxin Tang
2. Hanyang Gao
3. Guoxin Hu
4. A. Mahmood
5. C. Soldano
6. E. Dujardin
7. J. Lam
8. L. Zou

Citations in the corpus

• Production, properties and potential of graphene (2010, methodology): “[234] Masubuchi S, Ono M, Yoshida K, Hirakawa K, Machida T.”
• Raman Spectroscopic Characterization of Graphene (2010, background): “One-dimensional graphene nanoribbon (GNR), which can be produced by traditional lithography technique from graphene sheet, have received intense attention ( 1 , 113 – 116 ).”