Study of a high contrast process for hydrogen silsesquioxane as a negative tone electron beam resist

By W. Henschel, Y. Georgiev, H. Kurz. 2003

166 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/3f3157ded506e562a8b5bedaf65a6a1dda865086