Effect of Deposition Conditions on Mechanical Properties of Low-Temperature PECVD Silicon Nitride Films

By Han Huang, K. Winchester, A. Suvorova, Yiping Liu, Xiaozhi Hu, B. Lawn, J. Dell, L. Faraone. 2005

191 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/3e8eff64e8add581847fb687cfc472d57347156d