Mechanical aspects of the chemical mechanical polishing process: A review

By Hyunseop Lee, Dasol Lee, Haedo Jeong. 2016

148 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/3c362a0c19b6a7f6a94342f027e2850194740982