Metallic 1T phase source/drain electrodes for field effect transistors from chemical vapor deposited MoS2
By R. Kappera, D. Voiry, S. Yalcin, Wesley Jen, Muharrem Acerce, S. Torrel, B. Branch, Sidong Lei, Weibing Chen, S. Najmaei and 5 more. 2014
177 citations recorded by the source corpus.
Two dimensional transition metal dichalcogenides (2D TMDs) offer promise as opto-electronic materials due to their direct band gap and reasonably good mobility values. However, most metals form high resistance contacts on semiconducting TMDs such as MoS2. The large contact resistance limits the performance of devices. Unlike bulk materials, low contact resistance cannot be stably achieved in 2D materials by doping. Here we build on our previous work in which we demonstrated that it is possible to achieve low contact resistance electrodes by phase transformation. We show that similar to the previously demonstrated mechanically exfoliated samples, it is possible to decrease the contact resistance and enhance the FET performance by locally inducing and patterning the metallic 1T phase of MoS2 on chemically vapor deposited material. The device properties are substantially improved with 1T phase source/drain electrodes.
Subfields: Electrical and Electronic Engineering, Materials Chemistry
View Paper: https://www.semanticscholar.org/paper/3c0dc666ef03812d670e91de60e797dbc013faa2
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In Electrical and Electronic Engineering
In Materials Chemistry
Citations in the corpus
- Progress in Contact, Doping and Mobility Engineering of MoS2: An Atomically Thin 2D Semiconductor (2018, background): “(e) Schematic illustrations of the contact geometries used in multilayer exfoliated MoS2 flakes (top schematic) and CVD-grown MoS2 flakes with gradually shrinking basal planes or “terraced” edges (bottom schematic).”