A deep sub-wavelength process for the formation of highly uniform arrays of nanoholes and nanopillars

By Wei Wu, A. Katsnelson, O. G. Memis, Hooman Mohseni. 2007

170 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/3c0bcc81cf68248f612ebf5d10b3b507f97c4096