Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm

By O. Jeong, Sangsik Yang. 2000

202 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/3bced48517cebee9247fcc5529bdaed277ff6cce

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Chang-Jin Kim
2. Frieder Mugele

In Mechanical Engineering

1. Chang-Jin Kim
2. Frieder Mugele
3. Jean-Christophe Baret
4. Stephen R. Quake
5. T. Squires

Citations in the corpus

• A surface-tension driven micropump for low-voltage and low-power operations (2002, background): “Previously, a number of mechanical micropumps have been developed using various mechanisms, including piezoelectric [2]–[4], electrostatic [5], [6], thermopneumatic [7]–[9], electromagnetic [10], bimetallic [11] and shape memory alloy (SMA) actuations [12].”
• MEMS-based micropumps in drug delivery and biomedical applications (2008, unknown): “designed a thermopneumatic micropump [49] ith a corrugated diaphragm.”