A comparative study on lanthanide oxide thin films grown by atomic layer deposition

By J. Paeivaesaari, M. Putkonen, L. Niinistö. 2005

167 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/3bb29917eebf22faaedbefe37f82329a60f1fe9e