ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor
By S. Chou, L. Teoh, W. Lai, Yen-Hsun Su, M. Hon. Italian National Conference on Sensors, 2006
138 citations recorded by the source corpus.
The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrate using Pt as interdigitated electrodes. The structure was characterized by XRD and SEM analyses, and the ethanol vapor gas sensing as well as electrical properties have been investigated and discussed. The gas sensing results show that the sensitivity for detecting 400 ppm ethanol vapor was ∼20 at an operating temperature of 250°C. The high sensitivity, fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetron sputtering can be used for ethanol vapor gas sensing.
Subfields: Bioengineering, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/3b3a5ab9fa6306b1b1a7f765b3b7e09cf4c920df
How researchers see this paper
The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.
In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- A Survey on Gas Sensing Technology (2012, background): “, detection of carbon monoxide) [61–73]; (5) environmental studies (e.”
- Metal-core@metal oxide-shell nanomaterials for gas-sensing applications: a review (2015, background): “Semiconductor-based gas sensors can be fabricated as three types of devices: sintered pellet (Moon et al. 2001), thick film (Kim et al. 2015), and thin film (Chou et al. 2006) types.”