Fabrication of three-dimensional microstructure using maskless gray-scale lithography

By K. Totsu, K. Fujishiro, Shuji Tanaka, Masayoshi Esashi. 2006

166 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/3aeb2fb2f0cf7a29e537f3d89612d20b5e8aac88