Electron beam lithography in nanoscale fabrication: recent development

By Ampere A. Tseng, Kuan Chen, Chiidong Chen, K. Ma. 2003

459 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/3a5d9fafe1bd16c60d72fc3ae34c131e615167ec

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Alexey V. Kimel
2. Richard F. L. Evans
3. A. Kirilyuk
4. Ian F. Akyildiz

In Electrical and Electronic Engineering

1. Alexey V. Kimel
2. Ian F. Akyildiz
3. A. Kirilyuk
4. Theo Rasing
5. Josep Miquel Jornet
6. Chong Han
7. Mohamed-Slim Alouini
8. Shuai Nie

In Surfaces, Coatings and Films

1. Ian F. Akyildiz

Citations in the corpus

• Ultrafast heating as a sufficient stimulus for magnetization reversal in a ferrimagnet (2012, methodology): “Sample preparation of microstructures The structures are produced via a lift-off techniqu”
• Nanonetworks: A new communication paradigm (2008, methodology): “To achieve this goal, advanced manufacturing techniques, such as electron beam lithography [61] and micro-contact printing [42], are used.”