The effect of substrate temperature and biasing on the mechanical properties and structure of sputtered titanium nitride thin films

By P. Patsalas, C. Charitidis, S. Logothetidis. 2000

260 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/39e1507fcf4fbf977b08a1d95693445711084b16

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In Biomedical Engineering

1. N. Kalfagiannis
2. S. Kassavetis
3. P. Patsalas

In Materials Chemistry

1. N. Kalfagiannis
2. S. Kassavetis
3. P. Patsalas

In Mechanics of Materials

1. N. Kalfagiannis
2. S. Kassavetis
3. P. Patsalas

Citations in the corpus

• Optical Properties and Plasmonic Performance of Titanium Nitride (2015, methodology): “A wide variety of fabrication techniques have been used for the growth of B1-TiN films, such as Magnetron Sputtering (MS) [83–90], Cathodic Vacuum Arc (CVA) [91–93], Chemical Vapor Deposition (CVD) [94,95], Atomic Layer Deposition (ALD) [96,97], Pulsed Laser Deposition [15,16,98,99], Ion Beam Assist”