Silicon Oxynitride Layers for Optical Waveguide Applications

By R. Germann, H. Salemink, R. Beyeler, G. Bona, F. Horst, I. Massarek, B. Offrein. 2000

144 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/37f0a1cc5106657a9c4d2b2c282d1770875e0ac5