Metal Silicides in CMOS Technology: Past, Present, and Future Trends

By Shi-Li Zhang, Mikael Östling. 2003

345 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/3737352734b8896ec673add87be085cac691e0c2