Hybrid silicon and lithium niobate electro-optical ring modulator
By Li Chen, Qiang Xu, M. Wood, R. Reano. 2014
229 citations recorded by the source corpus.
Of all oxides, lithium niobate (LiNbO3) is the gold standard electro-optical material in fiber-optic transmission systems. Modulators based on diffused waveguides in bulk LiNbO3 substrates are, however, relatively large. In contrast, ring modulators based on silicon-on-insulator are of interest for chip-scale electro-optical modulation, but unstrained crystalline silicon does not exhibit a linear electro-optic effect, so modulation is based on alternative mechanisms such as the plasma dispersion effect. Here, we present a hybrid silicon and LiNbO3 electro-optical ring modulator operating at gigahertz frequencies. The modulator consists of a 15 μm radius silicon microring and an ion-sliced LiNbO3 thin film bonded together via benzocyclobutene. Fabricated devices operating in the TE optical mode exhibit an optical loaded quality factor of 14,000 and a resonance tuning of 3.3 pm/V. The small-signal electrical-to-optical 3 dB bandwidth is measured to be 5 GHz. Digital modulation with an extinction ratio greater than 3 dB is demonstrated up to 9 Gb/s. High-speed and low-tuning-power chip-scale modulators that exploit the high-index contrast of silicon with the second-order susceptibility of LiNbO3 are envisioned.
Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/36464dc86a82b2fbe6c92b61ca1a5516cffdc07f
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In Atomic and Molecular Physics, and Optics
- A. Rueda
- Gerd Leuchs
- Christoph Marquardt
- H. Schwefel
- J. M. Fink
- Dmitry Strekalov
- Oskar J. Painter
- F. Sedlmeir
In Electrical and Electronic Engineering
Citations in the corpus
- Efficient microwave to optical photon conversion: an electro-optical realization (2016, methodology): “Efficient direct electro-optic modulation as demonstrated, for example, in integrated microstructures [14,15] has been discussed by Tsang [16,17] as an alternative approach.”