Self-buckling of micromachined beams under resistive heating

By Mu Chiao, Liwei Lin. Journal of microelectromechanical systems, 2000

133 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/36357bcd2dc2bf28f04f3b6f19e94255d3c13aed

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In Atomic and Molecular Physics, and Optics

1. Yin Zhang

In Electrical and Electronic Engineering

1. Yin Zhang

Citations in the corpus

• A self-retracting fully compliant bistable micromechanism (2003, unknown): “15 Bistable MEMS based on buckled beams have been proposed utilizing beams buckled by residual stress [51, 50, 18] (a by-product of the fabrication processes), thermally induced stress [8], or by applying external loading by on-chip actuation [42].”
• Snap-Through and Pull-In Instabilities of an Arch-Shaped Beam Under an Electrostatic Loading (2007, background): “However, for the structures with a flat initial configuration, the constant residual stress or thermal loading sometimes can be so large that the microstructures enter the postbuckling region with a curvy equilibrium configuration [32],[33].”