Mass flow and tangential momentum accommodation in silicon micromachined channels

By E. Arkilic, Kenneth S. Breuer, MARTIN A. Schmidt. Journal of Fluid Mechanics, 2001

308 citations recorded by the source corpus.

Subfields: Applied Mathematics, Atomic and Molecular Physics, and Optics, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/3501400863eea24bcd0ae012a68be441ce3f54a9

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Applied Mathematics

1. David R. Emerson
2. Zhihui Li
3. Robert W. Barber
4. Yangyang He
5. Stephen R. Quake
6. T. Squires
7. K. Xu
8. S. Colin

In Atomic and Molecular Physics, and Optics

1. Robert W. Barber
2. David R. Emerson
3. Zhihui Li
4. Stephen R. Quake
5. T. Squires
6. K. Xu
7. S. Colin

In Materials Chemistry

1. T. Squires
2. Robert W. Barber
3. David R. Emerson
4. Zhihui Li
5. Stephen R. Quake
6. K. Xu
7. S. Colin

Citations in the corpus

• Rarefaction and compressibility effects on steady and transient gas flows in microchannels (2005, methodology): “ Arkilic et al. (2001) used two silicon wafers facing each other, Colin et al. (2004) studied microchannels etched by deep reactive ion etching (DRIE) in silicon and covered with a glass sealed by anodic bonding, whereas Maurer et al. (2003) used microchannels etched in glass and covered with silic”
• Microchannel flow in the slip regime: gas-kinetic BGK–Burnett solutions (2004, methodology): “For example, Arkilic et al. (1997) presented a two-dimensional analysis with the first-order velocity slip boundary condition, and demonstrated the effects of both compressibility and rarefaction in long microchannels. They showed that the zero-order analytic solution corresponded well with the expe”
• Mass flow rate measurements in a microchannel, from hydrodynamic to near free molecular regimes (2007, methodology): “Moreover, it is shown using scattering kernel formalism (Cercignani 1990) that α represents also the accommodation coefficient of any kinetic molecule parameter; but establishing σ p , Maxwell (1878) considered α as the accommodation coefficient of the momentum tangential component, since it is usua”
• Microfluidics: Fluid physics at the nanoliter scale (2005, background): “This represents the leading-order correction due to finite Kn; second-order effects may play a role as Kn increases Arkilic et al., 2001; Maurer et al., 2003 .”
• Challenges in Modeling Gas-Phase Flow in Microchannels: From Slip to Transition (2006, methodology): “Arkilic et al. [ 16 ] considered a first-order slip model and investigated flows up to an outlet Knudsen number of 0.4, while Maurer et al. [17] employed a second-order model and investigated flows up to an outlet Knudsen number of 1.46.”
• Experimental study of compressibility, roughness and rarefaction influences on microchannel flow (2007, background): “[44] also studied nitrogen, argon and CO2 flow through a silicon microchannel with 1.”