Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

By O. Ylivaara, Xuwen Liu, Lauri Kilpi, J. Lyytinen, D. Schneider, M. Laitinen, J. Julin, Saima Ali, S. Sintonen, M. Berdova and 7 more. 2014

174 citations recorded by the source corpus.

Subfields: Condensed Matter Physics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/3476139c3328ffc27ca0fd8bd0bc8234cc181f41