A post-CMOS micromachined lateral accelerometer

By H. Luo, Gang Zhang, L. Carley, G. Fedder. 2002

170 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/339a948824f039f248d9bb53fc8d605dc70b9671