Piezoelectric aluminum nitride nanoelectromechanical actuators

By N. Sinha, G. E. Wabiszewski, R. Mahameed, V. Felmetsger, S. Tanner, Robert W. Carpick, Gianluca Piazza. 2009

164 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/33980dd3f435b7fbe4db3453ad7a3ef61e2e3f2a

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Il-Kwon Oh
2. Asif Khan
3. Heung Soo Kim
4. Zafar Abas

In Electrical and Electronic Engineering

1. Il-Kwon Oh
2. Asif Khan
3. Heung Soo Kim
4. Zafar Abas

Citations in the corpus

• Piezoelectric thin films: an integrated review of transducers and energy harvesting (2016, background): “(a) Piezoelectric AlN nanoactuator schematic [49] (reproduced with permission; copyright 2015 AIP Publishing).”