Low Temperature Atomic Layer Deposition of Tin Oxide

By Jaeyeong Heo, Adam S. Hock, R. Gordon. 2010

147 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/3324d84b08a2e0679194486ee0ed097bb4217b59

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In Electrical and Electronic Engineering

  1. Tonio Buonassisi

In Materials Chemistry

  1. Tonio Buonassisi

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