Mechanical and optical properties of hard SiCN coatings prepared by PECVD

By P. Jędrzejowski, J. Cizek, Aram Amassian, J. Klemberg-Sapieha, J. Vlček, Ludvik Martinu. 2004

147 citations recorded by the source corpus.

Subfields: Ceramics and Composites, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/331089c07c82434f1ea0b516c444bc44a5b49e18