Wafer-scale synthesis and transfer of graphene films.
By Youngbin Lee, S. Bae, Houk Jang, Sukjae Jang, Shou-En Zhu, S. Sim, Y. Song, B. Hong, Jong-Hyun Ahn. Nano letters (Print), 2009
1,140 citations recorded by the source corpus.
We developed means to produce wafer scale, high-quality graphene films as large as 3 in. wafer size on Ni and Cu films under ambient pressure and transfer them onto arbitrary substrates through instantaneous etching of metal layers. We also demonstrated the applications of the large-area graphene films for the batch fabrication of field-effect transistor (FET) arrays and stretchable strain gauges showing extraordinary performances. Transistors showed the hole and electron mobilities of the device of 1100 +/- 70 and 550 +/- 50 cm(2)/(V s) at drain bias of -0.75 V, respectively. The piezo-resistance gauge factor of strain sensor was approximately 6.1. These methods represent a significant step toward the realization of graphene devices in wafer scale as well as application in optoelectronics, flexible and stretchable electronics.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Materials Chemistry
View Paper: https://www.semanticscholar.org/paper/3302ec1a9fd7026f2e7d59e52f6ea6b4e68d44a2
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Citations in the corpus
- Graphene and derivatives – Synthesis techniques, properties and their energy applications (2017, positive): “This has opened a new path to researchers to address controlling the number of layers, and to control the thickness on various metal substrates [20-26].”
- High-quality and efficient transfer of large-area graphene films onto different substrates (2013, methodology): “This structure is important to the large-area graphene transfer [3,5,12,16], because the sup-”
- Towards industrial applications of graphene electrodes (2010, methodology): “Lee et al [29] recently reported a wafer-scale synthesis and transfer method that utilizes poly-di-methyl-siloxane (PDMS) or thermal-release tape as polymer supports to transfer graphene from on-metal layers to target substrates.”
- Graphene based materials: Past, present and future (2011, methodology): “Lee and coworkers have used SiO2/Si substrates, coated with 300 nm thick Ni or 700 nm thick Cu to produce graphene layers [47].”
- Synthesis of graphene crystals from solid waste plastic by chemical vapor deposition (2014, methodology): “Among these methods CVD has gained much attention due to scalable production of large-area graphene film [7,17–21].”