Recombination at the interface between silicon and stoichiometric plasma silicon nitride

By M. Kerr, A. Cuevas. 2002

137 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/31af1d77a6927a675f48d70172bf5b0986d040ae

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In Electrical and Electronic Engineering

  1. D. Macdonald
  2. A. Cuevas
  3. Stefan W. Glunz
  4. A. Richter

Citations in the corpus