A Comprehensive Study of Low-k SiCOH TDDB Phenomena and Its Reliability Lifetime Model Development

By Fen Chen, O. Bravo, K. Chanda, Paul S. McLaughlin, Timothy D. Sullivan, Jason P. Gill, James R. Lloyd, R. Kontra, J. Aitken. 2006 IEEE International Reliability Physics Symposium Proceedings, 2006

153 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/314b116b987eebf65e31a09ec6df005fa5fdde90